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Impact of cavity shape on thermal accelerometer parameters

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  • Additional Information
    • Contributors:
      Matériaux, Micro et Nanodispositifs (M2N); Institut d’Electronique et des Systèmes (IES); Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM); Nano and Microsystems - IEMN (NAM6 - IEMN); Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL); Matériaux (MAT); Capteurs et Instrumentations (CI); CMNF; Renatech Network; ANR-22-PEEL-0002,RESISTE,capteuRs microsystèmES electro-mécanIqueS pour environnemenTs sévèrEs(2022); ANR-21-ESRE-0012,NANOFUTUR,Investissements en NANOfabrication pour les nanotechnologies du FUTUR(2021)
    • Publication Information:
      CCSD
    • Publication Date:
      2024
    • Collection:
      LillOA (HAL Lille Open Archive, Université de Lille)
    • Subject Terms:
    • Abstract:
      International audience ; Many kinds of accelerometers have been developed for measuring vibration and shock in different application. Thermal accelerometer, developed for the last fifteen years, present good advantages since it works on thermal convection with no moving parts and could survive very high levels of shock up to tens to thousands of g. The sensor principle is based on free convection in a cavity containing a gas. It is composed of a heating resistor placed in the middle of the chamber between two temperature detectors. Under the influence of an acceleration Γ, the temperature profile shifts and the balance is modified creating a temperature difference on the detectors equal to δT, proportional to the applied acceleration, giving an equivalent sensitivity S = δT/Γ (°C/g). The present abstract show the evolution of sensibility as a function of acceleration for five geometries. These results have been carried out by CFD simulation with Fluent® software. We have also reported the sensitivity issued from the simulation experiment as a function of cavity diameter. We can conclude that in steady state, the shape of the sensors has little or no influence on the sensor response.
    • Online Access:
      https://hal.science/hal-04800626
      https://hal.science/hal-04800626v1/document
      https://hal.science/hal-04800626v1/file/Impact%20of%20cavity%20shape%20on%20thermal%20accelerometer%20parameters%20_Poster_Toulme.pdf
    • Rights:
      https://creativecommons.org/publicdomain/zero/1.0/ ; info:eu-repo/semantics/OpenAccess
    • Accession Number:
      edsbas.D0F3E898