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3-D Vision Feedback for Nanohandling Monitoring in a Scanning Electron Microscope.

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  • Author(s): Jähnisch, Marco1 (AUTHOR) ; Fatikow, Sergej2 (AUTHOR)
  • Source:
    International Journal of Optomechatronics. 2007, Vol. 1 Issue 1, p4-26. 23p. 1 Black and White Photograph, 15 Diagrams.