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Academic Journal

Preferential crystal orientation etching of GaN nanopillars in Cl2 plasma

Subjects: [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

  • Source: ISSN: 1369-8001 ; Materials Science in Semiconductor Processing ; https://hal.science/hal-04123125 ; Materials Science in Semiconductor Processing, 2023, 165, pp.107654.

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Conference

Experimental assessment of nanovoids growth

Subjects: [PHYS.NEXP]Physics [physics]/Nuclear Experiment [nucl-ex]; [PHYS.NUCL]Physics [physics]/Nuclear Theory [nucl-th]MontrealMontreal, Canada

  • Source: ICTAM 24th - 24th International Conference of Theoretical and Applied Mechanics ; https://cea.hal.science/cea-02442320 ; ICTAM 24th - 24th International Conference of Theoretical and Applied

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